Previously the RC-05
The JIMA RT RC-05B is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nanofocus X-ray inspection systems. JIMA RT RC-05B supports resolutions between 3 microns and 50 microns (3 µm and 50 µm). This corresponds to focal spot sizes between 6 microns and 100 micron (6 µm and 100 µm). This chart comes with a storage case, at no additional cost, and should be removed from the case while in use.
Left: unit; Right: unit in storage case
Microchart Pattern
Material
16 Au charts are laid out on 8x8mm Si Chip. Si Chip is fixed on 40x30x3mm Aluminum Base. Surface is covered with protection film.
| Outer Size (WxDxT) | 40 x 30 x 3 mm |
| Si Base Chip Size | 8 x 8 x 0.2 mm |
| Absorption Material | Au Line, Thickness ≥ 1.0 µm |
| Protection Film | Polyester Film, T 0.05mm |
| Line and Space Size, 2 Patterns | T Shape Layout: 3, 4, 5, 6, 7, 8, 9, 10 µm |
| I Shape Only: 15, 20, 25, 30, 35, 40, 45, 50 µm | |
| L/S Width Tolerance | +/- 15% (3, 4 µm) |
| +/- 10% (5 µm and wider) | |
| Number of Line | Each 3 Line set |
| Operation Temperature | 10 °C ~ 70 °C |
