JIMA RT RC-05B Micro Resolution X-Ray Chart

JIMA RT RC-05B Micro Resolution X-Ray Chart

Supports Resolutions Between 3 Microns and 50 Microns (3 µm and 50 µm)

Overview

Previously the RC-05

The JIMA RT RC-05B is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nanofocus X-ray inspection systems. JIMA RT RC-05B supports resolutions between 3 microns and 50 microns (3 µm and 50 µm). This corresponds to focal spot sizes between 6 microns and 100 micron (6 µm and 100 µm). This chart comes with a storage case, at no additional cost, and should be removed from the case while in use.

 


 

 

 

 

 
Left: unit; Right: unit in storage case

Details

Microchart Pattern

  • 16 sets of L&S layout in 2x2 mm on 8x8 mm Si base as left
  • Below drawing is image for size 5 μm L&S
  • Number of Au Slit is 3 lines and 2 spaces
  • Width 3 to 10 μm : T Shape layout
  • Width 15 to 50 μm : I Shape layout L/S width
  • L/S width: 3, 4, 5, 6, 7, 8, 9, 10, 15, 20, 25, 30, 35, 40, 45, 50 μm

Material

16 Au charts are laid out on 8x8mm Si Chip. Si Chip is fixed on 40x30x3mm Aluminum Base. Surface is covered with protection film.

Technical Specifications

RC-05B Specifications

Outer Size (WxDxT) 40 x 30 x 3 mm
Si Base Chip Size 8 x 8 x 0.2 mm
Absorption Material Au Line, Thickness ≥ 1.0 µm
Protection Film Polyester Film, T 0.05mm
Line and Space Size, 2 Patterns T Shape Layout: 3, 4, 5, 6, 7, 8, 9, 10 µm
I Shape Only: 15, 20, 25, 30, 35, 40, 45, 50 µm
L/S Width Tolerance +/- 15% (3, 4 µm)
+/- 10% (5 µm and wider)
Number of Line Each 3 Line set
Operation Temperature 10 °C ~ 70 °C

 

Description Part # Saved Price Select Option Add to
JIMA RT RC-05B Micro Resolution X-Ray Chart RT-JI-RTRC-05B $2,500.00