The JIMA RT RC-04 is a resolution chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring system resolution and ensures high quality results of your microfocus or nanofocus X-Ray inspection systems. There are 23 T-shaped lines, each containing 7 spaces, ranging in size from 0.1µm up to 10µm. This chart comes with a storage case, at no additional cost, and should be removed from the case when in use.
Left: Unit; Right: Unit in Storage Case
Line/Space Sizes: 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 10, 1.5, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0, 9.0, 10.0 µm widths
Tungsten chart is drawn on a 6.25mm square Silicon chip. The chip is fixed to a 30 x 40 mm Aluminum base and covered with PET film to protect the chip.
| Housing Size | 30 x 40 mm x 5 mm thickness |
| Si Base Size | 15µm ± 1µm (thickness) |
| Absorption Material | Tungsten, Thickness ≥ 650 nm |
| Protection Film | PET Film (Thickness: 25 µm) |
| Number of Lines | 8 Lines (7 Spaces), V&H, T Shape Layout |
| Line/Space Size | 0.1µm up to 10µm: 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 10, 1.5, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0, 9.0, 10.0 µm widths |
| Line/Size Width Tolerance | 0.1, 0.15µm: ± 0.02µm / 0.02~2µm: ±10% / 3~10µm: ±8% by SEM |
| Operating Temperature Range | 50 °F to 158 °F (10 °C to 70 °C) |
