JIMA RT RC-04 Micro Resolution X-Ray Chart

JIMA RT RC-04 Micro Resolution X-Ray Chart

JIMA RT RC-04 Micro Resolution X-Ray Chart

The JIMA RT RC-04 is a resolution chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring system resolution and ensures high quality results of your microfocus or nanofocus X-Ray inspection systems. There are 23 T-shaped lines, each containing 7 spaces, ranging in size from 0.1µm up to 10µm (0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 10, 1.5, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0, 9.0, 10.0 µm widths). The image below illustrates this.

JIMA RT RC-04 Resolution Chart

Chip Cross Section

rt-rc-04-chip
Tungsten chart is drawn on a 6.25mm square Silicon chip. The chip is fixed to a 30 x 40 mm Aluminum base and covered with PET film to protect the chip.


Specifications:

  • Housing Size: 30 x 40 mm x 5 mm thickness
  • Si Base Size: 15µm ± 1µm (thickness)
  • Absorption Material: Tungsten, Thickness ≥ 650 nm
  • Protection Film: PET Film (Thickness: 25 µm)
  • Line / Size Width Tolerance: 0.1, 0.15µm: ± 0.02µm / 0.02~2µm: ±10% / 3~10µm: ±8% by SEM
  • Operating Temperature Range: 50°F to 158°F (10°C to 70°C)
rc-04-dims


rt-rc-04-unit
Unit
rt-rc-04-kit-in-case
Unit in Case
Description Part # Saved Price Select Option Add to
JIMA RT RC-04 Micro Resolution X-Ray Chart RT-JI-RTRC-04 $5,400.00