Adapting the most advanced technology of semiconductor processing, a new resolution chart for computed tomography (CT) systems has been developed. This new chart is very useful in verifying the performance of microfocus CT systems during calibration, alignment, setup and after maintenance.
The RT CT-01 utilizes gold (Au) as an absorption material and offers 5 different sizes of lines and spaces ranging from 3 microns to 7 microns. There are 3 lines in each pattern resulting in a T-shape layout. These images illustrate this.
Unit Size: | 0.8" x 1.56" (2 x 40 mm) (acrylic) |
Si Chip Size: | 0.03" x 0.28" x 0.008" (0.8 x 7 x 0.2 mm) |
Absorption Material: | Gold (Au) 4.0 µm |
Pattern Precision Tolerance: | ± 10% |
Holder Size: | 0.2" x 4.7" (5 x 120 mm) |
Base Size: | 2" x 0.75" (49.5 x 19 mm steel) |
Operating Temperature Range: | 50°F to 158°F (10°C to 70°C) |